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Quenched & Tempered 40Cr Positioning Shaft for Semiconductor Equipment HRC28-35
Header include
This product is a key precision positioning shaft specially developed for semiconductor manufacturing equipment. It selects 40Cr alloy structural steel, acquires both strong and tough base properties through quenching and tempering heat treatment, and finally achieves an ultra-smooth surface of Ra 0.4 through precision grinding and hard chromium plating surface treatment, in order to meet the strict requirements of semiconductor equipment for high rigidity, high stability and ultra-clean operation of positioning elements.
Abject of manufacture
1.Base material: 40Cr, a widely used medium carbon quenched and tempered steel. Its characteristics are high strength, good toughness, better hardenability than carbon steel, and it can obtain excellent comprehensive mechanical properties through heat treatment.
2.Heat treatment status: After quenching and tempering (quenching + high-temperature tempering), the overall hardness reaches HRC28-35. This hardness range ensures that the parts have high strength and sufficient toughness, capable of withstanding complex alternating loads and minor impacts, and avoiding brittle fracture.
3.Final state: After fine processing, the surface undergoes hard chromium plating treatment, and the surface roughness of the key mating surfaces is strictly controlled within Ra 0.4μm.
Core features and requirements
1.The best balance of strength and toughness (HRC28-35) : The quenching and tempering treatment enables this positioning axis to achieve an ideal combination of high strength and good toughness. It can not only ensuredimensional stability under long-term load, resist bending and deformation, but also its tough core can absorb vibration and micro-shock during equipment operation, preventing sudden fracture. Its reliability far exceeds that of unquenched and tempered or brittle materials with higher hardness.
2.Ultra-low friction and high wear resistance and rust prevention (hard chromium plating, Ra 0.4) : The hard chromium plating layer provides extremely high surface hardness and excellent wear resistance, while providing permanent rust protection for the parts. Combined with the mirror-like finish of Ra 0.4, the frictional resistance and particle generation between the shaft body and the linear bearing or bushing are effectively reduced, which is crucial for preventing pollution-sensitive semiconductor manufacturing environments.
3.Outstanding dimensional stability: The quenching and tempering treatment effectively refines the internal structure of the steel, eliminates processing stress, enabling the parts to resist slight deformation caused by the release of internal stress during long-term use and maintain positioning accuracy.
4.Meeting the cleanliness requirements of semiconductors: The extremely smooth surface and inert chromium layer jointly ensure that no metal debris is produced due to friction during high-speed movement of the parts, and the surface is easy to clean, which can maintain the cleanliness of the equipment cavity.
Key processes and technologies
To achieve the above-mentioned performance, its manufacturing process needs to be precisely controlled:
1.Quenching and tempering heat treatment lays the foundation:
First, the shaft parts after rough machining are subjected to overall quenching and tempering treatment to achieve a hardness of HRC28-35. This is the core of the entire process, providing a strong and tough "skeleton" for the parts. The uniformity of its performance directly determines the service life and reliability of the final product.
2.Precision mechanical processing and forming：
（1）After quenching and tempering, semi-finishing is carried out through a precision CNC lathe. Due to its moderate hardness, it has good processability at this stage and can be formed efficiently.
（2）To ensure the final dimensional accuracy and surface finish, precision grinding must be carried out. The key mating outer circles are finely ground using a high-precision cylindrical grinding machine. This process is the key to achieving Ra 0.4 and correcting the dimensional deviation at the micrometer level.
3.Surface strengthening and finishing (hard chromium plating) :
（1）After fine grinding, the parts enter the electroplating process for hard chromium plating. Through precise electroplating process control, a chromium layer with uniform thickness, strong adhesion and extremely high hardness is obtained.
（2）To meet the final requirement of Ra 0.4, precision polishing or honing is usually required after plating to reduce the micro-roughness of the coating, ensure a mirror-like smooth surface, and guarantee dimensional tolerances at the same time.
Conclusion
This 40Cr positioning shaft is a perfect combination of the performance of basic materials and precision surface engineering. It achieves outstanding core strength and toughness through quenching and tempering treatment, and then endows the surface with high wear resistance, rust prevention and ultra-low friction characteristics through hard chromium plating and superfinishing. This design that combines both internal and external aspects makes it perfectly competent for critical scenarios in semiconductor equipment that have strict requirements for long-term stability, precise positioning and clean operation. It is an important basic component for ensuring the high reliability and high yield rate of the equipment.
Quenched & Tempered 40Cr Positioning Shaft for Semiconductor Equipment HRC28-35
Header include
This product is a key precision positioning shaft specially developed for semiconductor manufacturing equipment. It selects 40Cr alloy structural steel, acquires both strong and tough base properties through quenching and tempering heat treatment, and finally achieves an ultra-smooth surface of Ra 0.4 through precision grinding and hard chromium plating surface treatment, in order to meet the strict requirements of semiconductor equipment for high rigidity, high stability and ultra-clean operation of positioning elements.
Abject of manufacture
1.Base material: 40Cr, a widely used medium carbon quenched and tempered steel. Its characteristics are high strength, good toughness, better hardenability than carbon steel, and it can obtain excellent comprehensive mechanical properties through heat treatment.
2.Heat treatment status: After quenching and tempering (quenching + high-temperature tempering), the overall hardness reaches HRC28-35. This hardness range ensures that the parts have high strength and sufficient toughness, capable of withstanding complex alternating loads and minor impacts, and avoiding brittle fracture.
3.Final state: After fine processing, the surface undergoes hard chromium plating treatment, and the surface roughness of the key mating surfaces is strictly controlled within Ra 0.4μm.
Core features and requirements
1.The best balance of strength and toughness (HRC28-35) : The quenching and tempering treatment enables this positioning axis to achieve an ideal combination of high strength and good toughness. It can not only ensuredimensional stability under long-term load, resist bending and deformation, but also its tough core can absorb vibration and micro-shock during equipment operation, preventing sudden fracture. Its reliability far exceeds that of unquenched and tempered or brittle materials with higher hardness.
2.Ultra-low friction and high wear resistance and rust prevention (hard chromium plating, Ra 0.4) : The hard chromium plating layer provides extremely high surface hardness and excellent wear resistance, while providing permanent rust protection for the parts. Combined with the mirror-like finish of Ra 0.4, the frictional resistance and particle generation between the shaft body and the linear bearing or bushing are effectively reduced, which is crucial for preventing pollution-sensitive semiconductor manufacturing environments.
3.Outstanding dimensional stability: The quenching and tempering treatment effectively refines the internal structure of the steel, eliminates processing stress, enabling the parts to resist slight deformation caused by the release of internal stress during long-term use and maintain positioning accuracy.
4.Meeting the cleanliness requirements of semiconductors: The extremely smooth surface and inert chromium layer jointly ensure that no metal debris is produced due to friction during high-speed movement of the parts, and the surface is easy to clean, which can maintain the cleanliness of the equipment cavity.
Key processes and technologies
To achieve the above-mentioned performance, its manufacturing process needs to be precisely controlled:
1.Quenching and tempering heat treatment lays the foundation:
First, the shaft parts after rough machining are subjected to overall quenching and tempering treatment to achieve a hardness of HRC28-35. This is the core of the entire process, providing a strong and tough "skeleton" for the parts. The uniformity of its performance directly determines the service life and reliability of the final product.
2.Precision mechanical processing and forming：
（1）After quenching and tempering, semi-finishing is carried out through a precision CNC lathe. Due to its moderate hardness, it has good processability at this stage and can be formed efficiently.
（2）To ensure the final dimensional accuracy and surface finish, precision grinding must be carried out. The key mating outer circles are finely ground using a high-precision cylindrical grinding machine. This process is the key to achieving Ra 0.4 and correcting the dimensional deviation at the micrometer level.
3.Surface strengthening and finishing (hard chromium plating) :
（1）After fine grinding, the parts enter the electroplating process for hard chromium plating. Through precise electroplating process control, a chromium layer with uniform thickness, strong adhesion and extremely high hardness is obtained.
（2）To meet the final requirement of Ra 0.4, precision polishing or honing is usually required after plating to reduce the micro-roughness of the coating, ensure a mirror-like smooth surface, and guarantee dimensional tolerances at the same time.
Conclusion
This 40Cr positioning shaft is a perfect combination of the performance of basic materials and precision surface engineering. It achieves outstanding core strength and toughness through quenching and tempering treatment, and then endows the surface with high wear resistance, rust prevention and ultra-low friction characteristics through hard chromium plating and superfinishing. This design that combines both internal and external aspects makes it perfectly competent for critical scenarios in semiconductor equipment that have strict requirements for long-term stability, precise positioning and clean operation. It is an important basic component for ensuring the high reliability and high yield rate of the equipment.
